Statistical analysis and design of semiconductor manufacturing systems

被引：0
|
作者：
Chen, A [1 ]
Guo, RS [1 ]
Lin, P [1 ]
机构：
[1] Natl Taiwan Univ, Grad Inst Ind Engn, Taipei 106, Taiwan
来源：
ISSM 2000: NINTH INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, PROCEEDINGS | 2000年
关键词：
manufacturing control; robust design; statistical process control;
D O I：
10.1109/ISSM.2000.993681
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The enormous complexity of a semiconductor manufacturing system is the main obstacle for making quality manufacturing control decisions. Conventional methodologies, such as queueing network and simulation analysis, are often too complex to be used effectively. In this paper, we will demonstrate a methodology to build simple statistical models that faithfully characterize the manufacturing system. We then show how these models can help improve the quality of manufacturing control decisions.
引用
收藏
页码：335 / 338
页数：4
相关论文
共 50 条
  • [31] Preface for Semiconductor Manufacturing Systems and Processes
    Cech, Martin
    Yoon, Jun Young
    Lee, Hakjun
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2024, 25 (09) : 1757 - 1758
  • [32] Energy analysis in semiconductor manufacturing
    Gopalakrishnan B.
    Mardikar Y.
    Korakakis D.
    Energy Engineering: Journal of the Association of Energy Engineering, 2010, 107 (02): : 6 - 40
  • [33] Design principles for integrated automated statistical quality-control systems in manufacturing
    A. S. Gorelov
    V. V. Preis
    V. B. Soskov
    Russian Engineering Research, 2008, 28 (3) : 251 - 254
  • [34] Design for manufacturing in the semiconductor industry: The litho/design workshops
    Schellenberg, FM
    TWELFTH INTERNATIONAL CONFERENCE ON VLSI DESIGN, PROCEEDINGS, 1999, : 111 - 119
  • [35] Geometric deviation modeling with Statistical Shape Analysis in Design for Additive Manufacturing
    Zhu, Zuowei
    Anwer, Nabil
    Mathieu, Luc
    29TH CIRP DESIGN CONFERENCE 2019, 2019, 84 : 496 - 501
  • [36] Analysis and Design for Intelligent Manufacturing Cloud Control Systems
    Yan, Ce
    Li, Yiran
    Xia, Yuanqing
    2020 CHINESE AUTOMATION CONGRESS (CAC 2020), 2020, : 7174 - 7179
  • [37] A method for the concurrent design and analysis of networked manufacturing systems
    Milisavljevic-Syed, Jelena
    Commuri, Sesh
    Allen, Janet K.
    Mistree, Farrokh
    ENGINEERING OPTIMIZATION, 2019, 51 (04) : 699 - 717
  • [38] Reliability consideration in the design and analysis of cellular manufacturing systems
    Das, K.
    Lashkari, R. S.
    Sengupta, S.
    INTERNATIONAL JOURNAL OF PRODUCTION ECONOMICS, 2007, 105 (01) : 243 - 262
  • [39] Statistical analysis of semiconductor devices
    Mayergoyz, ID
    Andrei, P
    JOURNAL OF APPLIED PHYSICS, 2001, 90 (06) : 3019 - 3029
  • [40] Eliminating Re-Burn-In in Semiconductor Manufacturing through Statistical Analysis of Production Test Data
    Pham, Hung V.
    Demidenko, Serge N.
    Merola, Giovanni M.
    2017 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE (I2MTC), 2017, : 1477 - 1482
12345