Statistical analysis and design of semiconductor manufacturing systems

被引：0
|
作者：
Chen, A [1 ]
Guo, RS [1 ]
Lin, P [1 ]
机构：
[1] Natl Taiwan Univ, Grad Inst Ind Engn, Taipei 106, Taiwan
来源：
ISSM 2000: NINTH INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, PROCEEDINGS | 2000年
关键词：
manufacturing control; robust design; statistical process control;
D O I：
10.1109/ISSM.2000.993681
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The enormous complexity of a semiconductor manufacturing system is the main obstacle for making quality manufacturing control decisions. Conventional methodologies, such as queueing network and simulation analysis, are often too complex to be used effectively. In this paper, we will demonstrate a methodology to build simple statistical models that faithfully characterize the manufacturing system. We then show how these models can help improve the quality of manufacturing control decisions.
引用
收藏
页码：335 / 338
页数：4
相关论文
共 50 条
  • [1] Design of reconfigurable semiconductor manufacturing systems with maintenance and failure
    Tang, Y
    Zhou, MC
    2001 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS I-IV, PROCEEDINGS, 2001, : 559 - 564
  • [2] Modeling and performance analysis of semiconductor manufacturing systems
    Jeng, MD
    Xie, XL
    1998 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN, AND CYBERNETICS, VOLS 1-5, 1998, : 650 - 655
  • [3] Chamber Matching of Semiconductor Manufacturing Process Using Statistical Analysis
    Pan, Tian-Hong
    Wong, David Shan-Hill
    Jang, Shi-Shang
    IEEE TRANSACTIONS ON SYSTEMS MAN AND CYBERNETICS PART C-APPLICATIONS AND REVIEWS, 2012, 42 (04): : 571 - 576
  • [4] ON THE ANALYSIS AND DESIGN OF MANUFACTURING SYSTEMS
    WILSON, DR
    WINTER, SC
    MICROPROCESSING AND MICROPROGRAMMING, 1987, 21 (1-5): : 433 - 439
  • [5] ANALYSIS OF EXPERT SYSTEMS IN MANUFACTURING DESIGN
    HERAGU, SS
    KUSIAK, A
    IEEE TRANSACTIONS ON SYSTEMS MAN AND CYBERNETICS, 1987, 17 (06): : 898 - 912
  • [6] Design for semiconductor manufacturing - bibliography
    Univ of Virginia, Charlottesville, United States
    IEEE transactions on components, packaging and manufacturing technology. Part C. Manufacturing, 1997, 20 (01): : 73 - 86
  • [7] Intelligent design of diagnosable systems: A case study of semiconductor manufacturing machines
    Wen, YuanLin
    Chung, ShengLuen
    Jeng, LiDer
    Jeng, MuDer
    KNOWLEDGE-BASED INTELLIGENT INFORMATION AND ENGINEERING SYSTEMS: KES 2007 - WIRN 2007, PT II, PROCEEDINGS, 2007, 4693 : 877 - 884
  • [8] CONCEPTUAL DESIGN OF A SOFTWARE OBJECT LIBRARY FOR SIMULATION OF SEMICONDUCTOR MANUFACTURING SYSTEMS
    GLASSEY, CR
    ADIGA, S
    JOURNAL OF OBJECT-ORIENTED PROGRAMMING, 1989, 2 (04): : 39 - 43
  • [9] Statistical methods for measurement reduction in semiconductor manufacturing
    Babikian, R
    Engelhard, C
    ASMC 98 PROCEEDINGS - 1998 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP: THEME - SEMICONDUCTOR MANUFACTURING: MEETING THE CHALLENGES OF THE GLOBAL MARKETPLACE, 1998, : 212 - 215
  • [10] A Statistical Model to Analyze the Complexity of Semiconductor Manufacturing
    Neshati, Ramin
    2013 PROCEEDINGS OF TECHNOLOGY MANAGEMENT IN THE IT-DRIVEN SERVICES (PICMET'13), 2013, : 2757 - 2764
12345