Distributed MEMS tunable matching network using minimal-contact RF-MEMS varactors

被引：57
|
作者：
Shen, Qin [1 ]
Barker, N. Scott [1 ]
机构：
[1] Univ Virginia, Dept Elect & Comp Engn, Charlottesville, VA 22903 USA
来源：
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 2006年 / 54卷 / 06期
关键词：
distributed microelectromechanical-system (MEMS) transmission line (DMTL); RF-MEMS; tunable matching network;
D O I：
10.1109/TMTT.2006.872943
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the design, fabrication, and measurement of a double-slug tunable matching network based on a distributed microelectromechanical-system (MEMS) transmission line. The tuner is implemented with a new minimal-contact RF-MEMS varactor that largely eliminates stiction while allowing the capacitance ratio to be set anywhere from 2 to 5. The measured performance of the tunable matching network demonstrates complete coverage of the Smith chart out to a maximum voltage standing-wave ratio of 12:1 from 10 to 30 GHz with excellent agreement between measurement and simulation results.
引用
收藏
页码：2646 / 2658
页数：13
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