Distributed MEMS tunable matching network using minimal-contact RF-MEMS varactors

被引：57

作者：

Shen, Qin ^{[1
]}

Barker, N. Scott ^{[1
]}

机构：

[1] Univ Virginia, Dept Elect & Comp Engn, Charlottesville, VA 22903 USA

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 2006年 / 54卷 / 06期

关键词：

distributed microelectromechanical-system (MEMS) transmission line (DMTL); RF-MEMS; tunable matching network;

D O I：

10.1109/TMTT.2006.872943

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design, fabrication, and measurement of a double-slug tunable matching network based on a distributed microelectromechanical-system (MEMS) transmission line. The tuner is implemented with a new minimal-contact RF-MEMS varactor that largely eliminates stiction while allowing the capacitance ratio to be set anywhere from 2 to 5. The measured performance of the tunable matching network demonstrates complete coverage of the Smith chart out to a maximum voltage standing-wave ratio of 12:1 from 10 to 30 GHz with excellent agreement between measurement and simulation results.

引用

页码：2646 / 2658

页数：13

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