Strip-loaded waveguide-based optical phase shifter for high-efficiency silicon optical modulators

被引：10

作者：

Maegami, Yuriko ^{[1
]}

Cong, Guangwei ^{[1
]}

Ohno, Morifumi ^{[1
]}

Okano, Makoto ^{[1
]}

Yamada, Koji ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, 16-1 Onogawa, Tsukuba, Ibaraki 3058569, Japan

来源：

PHOTONICS RESEARCH | 2016年 / 4卷 / 06期

关键词：

MACH-ZEHNDER MODULATOR; PERFORMANCE;

D O I：

10.1364/PRJ.4.000222

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose a novel silicon optical phase shifter structure based on heterogeneous strip-loaded waveguides on a photonic silicon on insulator (SOI) platform. The features of an etchless SOI layer and loaded strip would enhance the performance and uniformity of silicon optical modulators on a large-scale wafer. We implemented the phase shifter by loading an amorphous silicon strip onto an SOI layer with a vertical PN diode structure. Compared to the conventional lateral PN phase shifter based on half-etched rib waveguides, this phase shifter shows a > 1.5 times enhancement of modulation efficiency and provides > 20 GHz high-speed operation. (C) 2016 Chinese Laser Press

引用

页码：222 / 226

页数：5

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