Strip-loaded waveguide-based optical phase shifter for high-efficiency silicon optical modulators

被引:10
|
作者
Maegami, Yuriko [1 ]
Cong, Guangwei [1 ]
Ohno, Morifumi [1 ]
Okano, Makoto [1 ]
Yamada, Koji [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, 16-1 Onogawa, Tsukuba, Ibaraki 3058569, Japan
关键词
MACH-ZEHNDER MODULATOR; PERFORMANCE;
D O I
10.1364/PRJ.4.000222
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We propose a novel silicon optical phase shifter structure based on heterogeneous strip-loaded waveguides on a photonic silicon on insulator (SOI) platform. The features of an etchless SOI layer and loaded strip would enhance the performance and uniformity of silicon optical modulators on a large-scale wafer. We implemented the phase shifter by loading an amorphous silicon strip onto an SOI layer with a vertical PN diode structure. Compared to the conventional lateral PN phase shifter based on half-etched rib waveguides, this phase shifter shows a > 1.5 times enhancement of modulation efficiency and provides > 20 GHz high-speed operation. (C) 2016 Chinese Laser Press
引用
收藏
页码:222 / 226
页数:5
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