Sensitivity to combustible gas for ZnO thin films

被引：0
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作者：
Tan, GL
Wu, JA
Wu, XJ
机构：
来源：
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY | 1997年 / 13卷 / 04期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A fine polycrystalline ZnO thin film with 0.3 similar to 0.6 mu m grain size was obtained by sol-gel process and a consequential heat treatment at 500 degrees C. The process of preparing ZnO thin film was analysed. The sensitivity and conductivity of ZnO thin films as combustible gas (CO, CH4, H-2) sensor as well as the influence of catalyst and pH value of the precursor on its sensitivity were studied in detail. The structure characteristics of ZnO thin film by different process were investigated by X-ray diffraction, thermal analysis and photoelectron spectrometer. The atomic ratio of Zn to O on the surface of ZnO thin film was found to be 1.14:1 measured from XPS result. The conductivity of the thin film increases greatly when doped with Al3+ ion but decreases while doped with Na+ ion.
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页码：302 / 305
页数：4
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