Sensitivity to combustible gas for ZnO thin films

被引：0
|
作者：
Tan, GL
Wu, JA
Wu, XJ
机构：
来源：
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY | 1997年 / 13卷 / 04期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A fine polycrystalline ZnO thin film with 0.3 similar to 0.6 mu m grain size was obtained by sol-gel process and a consequential heat treatment at 500 degrees C. The process of preparing ZnO thin film was analysed. The sensitivity and conductivity of ZnO thin films as combustible gas (CO, CH4, H-2) sensor as well as the influence of catalyst and pH value of the precursor on its sensitivity were studied in detail. The structure characteristics of ZnO thin film by different process were investigated by X-ray diffraction, thermal analysis and photoelectron spectrometer. The atomic ratio of Zn to O on the surface of ZnO thin film was found to be 1.14:1 measured from XPS result. The conductivity of the thin film increases greatly when doped with Al3+ ion but decreases while doped with Na+ ion.
引用
收藏
页码：302 / 305
页数：4
相关论文
共 50 条
  • [11] Synthesis and Gas Sensitivity of Thin Chromium Oxide Films
    A. V. Almaev
    B. O. Kushnarev
    E. V. Chernikov
    V. A. Novikov
    Technical Physics Letters, 2020, 46 : 1028 - 1031
  • [12] Gas sensitivity of etioporphyrin metal complexes in thin films
    Goldshtrakh, M. A.
    Kononov, N. N.
    Dorofeev, S. G.
    Ischenko, A. A.
    JOURNAL OF ANALYTICAL CHEMISTRY, 2009, 64 (12) : 1247 - 1251
  • [13] Al-doped ZnO Thin Films via Sputtering: Influence of Structural Defects on Ozone Gas Sensitivity
    Sales, Douglas Henrique
    Leite, Ramon Resende
    Diaz, Julio Cesar Camilo Albornoz
    Komorizono, Amanda Akemy
    Bernardi, Maria Ines Basso
    Mastelaro, Valmor Roberto
    Longo, Elson
    Teixeira, Silvio Rainho
    de Souza, Agda Eunice
    MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS, 2024, 27
  • [14] CO Gas Sensing Characteristics of Nanostructured ZnO Thin Films
    Le Hung, Nguyen
    Kim, Hyojin
    Kim, Dojin
    KOREAN JOURNAL OF MATERIALS RESEARCH, 2010, 20 (05): : 235 - 240
  • [15] Nanocrystalline ZnO thin films: optoelectronic and gas sensing properties
    S. L. Patil
    S. G. Pawar
    A. T. Mane
    M. A. Chougule
    V. B. Patil
    Journal of Materials Science: Materials in Electronics, 2010, 21 : 1332 - 1336
  • [16] Gas microsensors based on semiconductor thin films of ZnO:Ga
    González-Vidal, JL
    Reyes-Barranca, A
    de la L Olvera, M
    Maldonado, A
    2004 1ST INTERNATIONAL CONFERENCE ON ELECTRICAL AND ELECTRONICS ENGINEERING (ICEEE), 2004, : 272 - 275
  • [17] Polarity dependent gas sensing properties of ZnO thin films
    Adachi, Yutaka
    Saito, Noriko
    Sakaguchi, Isao
    Suzuki, Taku T.
    THIN SOLID FILMS, 2019, 685 : 238 - 244
  • [18] Deposition of doped and undoped ZnO thin films for gas sensors
    Penza, M
    Martucci, C
    Anisimkin, VI
    Vasanelli, L
    ADVANCES IN CRYSTAL GROWTH, 1996, 203 : 137 - 142
  • [19] Nanocrystalline ZnO thin films: optoelectronic and gas sensing properties
    Patil, S. L.
    Pawar, S. G.
    Mane, A. T.
    Chougule, M. A.
    Patil, V. B.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2010, 21 (12) : 1332 - 1336
  • [20] The optical sensitivity to NOx of Ag-doped ZnO thin films
    He, HB
    Fan, ZX
    OPTICAL AND FIBER OPTIC SENSOR SYSTEMS, 1998, 3555 : 83 - 88
12345