WHISPERING GALLERY MODE BASED ON-CHIP GLASS MICROBUBBLE RESONATOR FOR THERMAL SENSING

被引：0

作者：

Zhang, Chenchen ^{[1
]}

Cocking, Alex ^{[1
]}

Freeman, Eugene ^{[1
]}

Liu, Zhiwen ^{[1
]}

Tadigadapa, Srinivas ^{[1
]}

机构：

[1] Penn State Univ, Mat Res Inst, Sch Elect Engn & Comp Sci, University Pk, PA 16802 USA

来源：

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年

关键词：

WGM resonator; glass microbubble; on-chip fabrication; high quality factor resonance; SENSORS; FILTERS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports the first experimental observations of whispering gallery mode (WGM) resonance in on-chip glass microbubble structures. Using microfabrication methods, chip-scale glass microbubbles with ultra-smooth surface and sub-micrometer wall thickness are shown to support optical resonance modes with ultra-high Q-factors of >10(7). The resonance is highly sensitive to temperature, with measured sensitivity of -1.8 GHz/degrees C. Based upon the signal to noise performance, this corresponds to a temperature resolution of 55 mu K.

引用

页码：630 / 633

页数：4

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