WHISPERING GALLERY MODE BASED ON-CHIP GLASS MICROBUBBLE RESONATOR FOR THERMAL SENSING

被引：0
|
作者：
Zhang, Chenchen [1 ]
Cocking, Alex [1 ]
Freeman, Eugene [1 ]
Liu, Zhiwen [1 ]
Tadigadapa, Srinivas [1 ]
机构：
[1] Penn State Univ, Mat Res Inst, Sch Elect Engn & Comp Sci, University Pk, PA 16802 USA
来源：
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年
关键词：
WGM resonator; glass microbubble; on-chip fabrication; high quality factor resonance; SENSORS; FILTERS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports the first experimental observations of whispering gallery mode (WGM) resonance in on-chip glass microbubble structures. Using microfabrication methods, chip-scale glass microbubbles with ultra-smooth surface and sub-micrometer wall thickness are shown to support optical resonance modes with ultra-high Q-factors of >10(7). The resonance is highly sensitive to temperature, with measured sensitivity of -1.8 GHz/degrees C. Based upon the signal to noise performance, this corresponds to a temperature resolution of 55 mu K.
引用
收藏
页码：630 / 633
页数：4
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