Influence of Schwoebel barrier and diffusion anisotropy on step density oscillation amplitude during epitaxial growth

被引：0
|
作者：
Neizvestny, IG [1 ]
Shwartz, NL [1 ]
Yanovitskaja, ZS [1 ]
机构：
[1] SB RAS, Inst Semicond Phys, Novosibirsk 930090, Russia
来源：
COMPUTATIONAL MATERIALS SCIENCE | 2006年 / 36卷 / 1-2期
关键词：
Monte Carlo; simulation; epitaxy; diffusion; anisotropy; Schwoebel barrier;
D O I：
10.1016/j.commatsci.2005.03.020
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Speeding up of step density oscillations (SDO) damping on singular surface with Schwoebel barriers was demonstrated by Monte Carlo simulation. Estimation of Schwoebel barrier necessary for complete absence of SDO was carried out. Increase of atomic surface anisotropy was shown to be responsible for slowing down SDO damping and oscillations phase shift for anisotropy similar to anisotropy on (001) reconstructed surfaces. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：180 / 183
页数：4
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