Influence of Schwoebel barrier and diffusion anisotropy on step density oscillation amplitude during epitaxial growth

被引：0
|
作者：
Neizvestny, IG [1 ]
Shwartz, NL [1 ]
Yanovitskaja, ZS [1 ]
机构：
[1] SB RAS, Inst Semicond Phys, Novosibirsk 930090, Russia
来源：
COMPUTATIONAL MATERIALS SCIENCE | 2006年 / 36卷 / 1-2期
关键词：
Monte Carlo; simulation; epitaxy; diffusion; anisotropy; Schwoebel barrier;
D O I：
10.1016/j.commatsci.2005.03.020
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Speeding up of step density oscillations (SDO) damping on singular surface with Schwoebel barriers was demonstrated by Monte Carlo simulation. Estimation of Schwoebel barrier necessary for complete absence of SDO was carried out. Increase of atomic surface anisotropy was shown to be responsible for slowing down SDO damping and oscillations phase shift for anisotropy similar to anisotropy on (001) reconstructed surfaces. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：180 / 183
页数：4
相关论文
共 50 条
  • [1] Influence of schwoebel barriers and surface diffusion anisotropy on surface relief evolution during epitaxial growth (simulation)
    Brunev, DV
    Neizvestny, IG
    Shwartz, NL
    Yanovitskaya, ZS
    IEEE 2001 SIBERIAN RUSSIAN STUDENT WORKSHOPS ON ELECTRON DEVICES AND MATERIALS PROCEEDINGS, 2001, : 4 - 7
  • [2] Influence of Schwoebel barriers and surface diffusion anisotropy on surface relief evolution during epitaxial growth: Simulation
    Brunev, DV
    Neizvestny, IG
    Shwartz, NL
    Yanovitskaya, ZS
    PHYSICS OF LOW-DIMENSIONAL STRUCTURES, 2001, 5-6 : 173 - 183
  • [3] Modelling of epitaxial film growth with an Ehrlich-Schwoebel barrier dependent on the step height
    Leal, F. F.
    Ferreira, S. C.
    Ferreira, S. O.
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2011, 23 (29)
  • [4] Large amplitude oscillation of magnetic anisotropy engineered by substrate step density
    Bauer, U.
    Przybylski, M.
    PHYSICAL REVIEW B, 2010, 81 (13)
  • [5] Step bunching in the absence of an Ehrlich-Schwoebel barrier during nanowire growth
    Golovin, A. A.
    Davis, S. H.
    Voorhees, P. W.
    JOURNAL OF APPLIED PHYSICS, 2010, 107 (02)
  • [6] Model for layer epitaxial growth kinetics in the presence of Schwoebel barrier
    Trofimov, VI
    Mokerov, VG
    DOKLADY AKADEMII NAUK, 1999, 367 (06) : 749 - 752
  • [7] Ehrlich-Schwoebel barrier controlled slope selection in epitaxial growth
    S. Schinzer
    S. Köhler
    G. Reents
    The European Physical Journal B - Condensed Matter and Complex Systems, 2000, 15 : 161 - 168
  • [8] Determination of the Ehrlich-Schwoebel barrier in epitaxial growth of thin films
    Li, Shao-Chun
    Han, Y.
    Jia, Jin-Feng
    Xue, Qi-Kun
    Liu, Feng
    PHYSICAL REVIEW B, 2006, 74 (19)
  • [9] Ehrlich-Schwoebel barrier controlled slope selection in epitaxial growth
    Schinzer, S
    Köhler, S
    Reents, G
    EUROPEAN PHYSICAL JOURNAL B, 2000, 15 (01): : 161 - 168
  • [10] A simple model of epitaxial growth: the influence of step edge diffusion
    Biehl, M
    Kinne, M
    Kinzel, W
    Schinzer, S
    COMPUTER PHYSICS COMMUNICATIONS, 1999, 121 : 347 - 352
12345