Phase-shifting point diffraction interferometer

被引：170
|
作者：
Medecki, H
Tejnil, E
Goldberg, KA
Bokor, J
机构：
[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720
[2] UNIV CALIF BERKELEY,DEPT PHYS,BERKELEY,CA 94720
来源：
OPTICS LETTERS | 1996年 / 21卷 / 19期
关键词：
D O I：
10.1364/OL.21.001526
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We describe a novel interferometer design suitable for highly accurate measurement of wave-front aberrations over a wide range of wavelengths, from visible to x ray. The new design, based on the point diffraction interferometer, preserves the advantages of the conventional point diffraction interferometer but offers higher efficiency and improved accuracy through phase shifting. These qualities make it applicable to at-wavelength testing of many optical systems, including short-wavelength projection lithography optics. A visible-light prototype was built and operated. (C) 1996 Optical Society of America
引用
收藏
页码：1526 / 1528
页数：3
相关论文
共 50 条
  • [41] Characterization of the accuracy of EUV phase-shifting point diffraction interferometry
    Naulleau, P
    Goldberg, K
    Lee, S
    Chang, C
    Bresloff, C
    Batson, P
    Attwood, D
    Bokor, J
    EMERGING LITHOGRAPHIC TECHNOLOGIES II, 1998, 3331 : 114 - 123
  • [42] Phase-shifting point-diffraction interferometry at 193 nm
    Lee, SH
    Naulleau, P
    Goldberg, KA
    Piao, F
    Oldham, W
    Bokar, J
    APPLIED OPTICS, 2000, 39 (31) : 5768 - 5772
  • [43] Recent advances in EUV phase-shifting point diffraction interferometry
    Naulleau, P
    Goldberg, KA
    Lee, SH
    Chang, C
    Batson, P
    Attwood, D
    Bokor, J
    EUV, X-RAY, AND NEUTRON OPTICS AND SOURCES, 1999, 3767 : 154 - 163
  • [44] Phase-shifting interferometer for surface inspection
    Tam, SC
    Low, BY
    Chua, HC
    Ho, ATS
    Neo, WP
    AUTOMATIC INSPECTION AND NOVEL INSTRUMENTATION, 1997, 3185 : 118 - 124
  • [45] Phase-shifting Savart shearing interferometer
    Lin, Shyh-Tsong
    Shih, Sheng-Hsiung
    Feng, Hsiung-Nien
    Tsai, Ting-Chiang
    OPTICAL ENGINEERING, 2006, 45 (12)
  • [46] Comment on "Phase-shifting shearing interferometer"
    Chang, KH
    Hsu, AC
    Chern, JL
    OPTICS LETTERS, 2002, 27 (07) : 509 - 510
  • [47] Infrared phase-shifting digital interferometer
    Chen, JB
    Chen, L
    Huang, SW
    Jin, GY
    AUTOMATED OPTICAL INSPECTION FOR INDUSTRY, 1996, 2899 : 532 - 538
  • [48] Phase-shifting birefringent scatterplate interferometer
    North-Morris, MB
    VanDelden, J
    Wyant, JC
    APPLIED OPTICS, 2002, 41 (04) : 668 - 677
  • [49] Phase-shifting point-diffraction interferometer developed by using the electro-optic effect in ferroelectric crystals
    Paturzo, M.
    Pignatiello, E.
    Grilli, S.
    De Nicola, S.
    Ferraro, P.
    OPTICS LETTERS, 2006, 31 (24) : 3597 - 3599
  • [50] Research on Reflective Polarization Phase-Shifting Dynamic Point Diffraction Interferometry
    Wang C.
    Zhou Y.
    Lu Q.
    Xu T.
    Liu S.
    Zhongguo Jiguang/Chinese Journal of Lasers, 2020, 47 (10):
12345