Phase-shifting point diffraction interferometer

被引：170
|
作者：
Medecki, H
Tejnil, E
Goldberg, KA
Bokor, J
机构：
[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720
[2] UNIV CALIF BERKELEY,DEPT PHYS,BERKELEY,CA 94720
来源：
OPTICS LETTERS | 1996年 / 21卷 / 19期
关键词：
D O I：
10.1364/OL.21.001526
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We describe a novel interferometer design suitable for highly accurate measurement of wave-front aberrations over a wide range of wavelengths, from visible to x ray. The new design, based on the point diffraction interferometer, preserves the advantages of the conventional point diffraction interferometer but offers higher efficiency and improved accuracy through phase shifting. These qualities make it applicable to at-wavelength testing of many optical systems, including short-wavelength projection lithography optics. A visible-light prototype was built and operated. (C) 1996 Optical Society of America
引用
收藏
页码：1526 / 1528
页数：3
相关论文
共 50 条
  • [31] Improved phase-shifting method for pinhole point diffraction interferometer based on a precise driving of the substrate
    Lu, Jiasheng
    LI, Bing
    Zhao, Zhuo
    Geng, Leqi
    OPTICS LETTERS, 2022, 47 (19) : 4877 - 4880
  • [32] Phase-shifting shearing interferometer
    Griffin, DW
    OPTICS LETTERS, 2001, 26 (03) : 140 - 141
  • [33] Phase-shifting scatterplate interferometer
    North-Morris, M
    Wyant, JC
    ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY 2000, 2000, 4231 : 59 - 66
  • [34] Simultaneous phase-shifting Twyman interferometer with a point source array
    Zheng, Donghui
    Chen, Lei
    Ding, Yu
    Sun, Qinyuan
    Zhu, Wenhua
    Li, Jinpeng
    OPTICAL ENGINEERING, 2017, 56 (11)
  • [35] Calibration for phase-shifting polarizer array in the simultaneous phase-shifting interferometer
    Yin, Jiayi
    Xu, Chen
    Su, Junhong
    Chen, Lei
    Zhongguo Jiguang/Chinese Journal of Lasers, 2009, 36 (SUPPL. 2): : 178 - 183
  • [36] Phase-shifting diffraction-grating interferometer for testing concave mirrors
    Hwang, TJ
    Kim, SW
    OPTICAL ENGINEERING, 2003, 42 (12) : 3532 - 3536
  • [37] Development of phase-shifting point diffraction interferometry with fiber point sources
    Oshikane, Yasushi
    Kataoka, Toshihiko
    Endo, Katsuyoshi
    Noguchi, Akihiro
    Inoue, Haruyuki
    Nakano, Motohiro
    Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 2003, 69 (05): : 678 - 682
  • [38] Circular carrier squeezing interferometry: Suppressing phase shift error in simultaneous phase-shifting point-diffraction interferometer
    Zheng, Donghui
    Chen, Lei
    Li, Jinpeng
    Sun, Qinyuan
    Zhu, Wenhua
    Anderson, James
    Zhao, Jian
    Schuelzgen, Axel
    OPTICS AND LASERS IN ENGINEERING, 2018, 102 : 136 - 142
  • [39] Research on phase-shifting characteristic of retarder array in simultaneous phase-shifting interferometer
    School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing
    Jiangsu
    210094, China
    不详
    Jiangsu
    210042, China
    Guangxue Xuebao, 4
  • [40] Phase-shifting point-diffraction interferometry at 193 nm
    Lee, S.H. (shlee@lbl.gov), 2000, Optical Society of America (OSA) (39):
12345