Translational Actuator for Precision Positioning with High Speed Motion

被引：0
|
作者：
Mori, Shigeki [1 ]
Sakurada, Akira [1 ]
Naganawa, Akihiro [2 ]
Shibuya, Yotsugi [2 ]
Obinata, Goro [3 ]
机构：
[1] AIT Akita Ind Technol Ctr, 4-21 Sanuki, Araya, Akita 0101623, Japan
[2] Akita Univ, Dept Mech Engn, Fac Engn & Resource Sci, Akita 0108502, Japan
[3] Nagoya Univ, EcoTopia Sci Inst, Chikusa Ku, Nagoya, Aichi 4648603, Japan
来源：
2012 DIGEST ASIA-PACIFIC MAGNETIC RECORDING CONFERENCE (APMRC) | 2012年
关键词：
actuator; staked piezoelectric element; translation mechanism; scanning probe microscope (SPM); elastic hinge; stage;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
Precision positioning actuators with high speed motion are demanded in the field of manufacturing inspections for semiconductor and flat display areas, and so on. The authors called "Nano-Motion Actuator (NMA)" which consisted of a displacement-amplifying mechanism and a stacked piezoelectric element [1]. However, its first resonance frequency became limited by displacement amplification. We proposed a new actuator mechanism that is applied translation mechanism for the scanning probe microscope (SPM), and so on.
引用
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页数：2
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