Translational Actuator for Precision Positioning with High Speed Motion

被引：0

作者：

Mori, Shigeki ^{[1
]}

Sakurada, Akira ^{[1
]}

Naganawa, Akihiro ^{[2
]}

Shibuya, Yotsugi ^{[2
]}

Obinata, Goro ^{[3
]}

机构：

[1] AIT Akita Ind Technol Ctr, 4-21 Sanuki, Araya, Akita 0101623, Japan

[2] Akita Univ, Dept Mech Engn, Fac Engn & Resource Sci, Akita 0108502, Japan

[3] Nagoya Univ, EcoTopia Sci Inst, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

2012 DIGEST ASIA-PACIFIC MAGNETIC RECORDING CONFERENCE (APMRC) | 2012年

关键词：

actuator; staked piezoelectric element; translation mechanism; scanning probe microscope (SPM); elastic hinge; stage;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

Precision positioning actuators with high speed motion are demanded in the field of manufacturing inspections for semiconductor and flat display areas, and so on. The authors called "Nano-Motion Actuator (NMA)" which consisted of a displacement-amplifying mechanism and a stacked piezoelectric element [1]. However, its first resonance frequency became limited by displacement amplification. We proposed a new actuator mechanism that is applied translation mechanism for the scanning probe microscope (SPM), and so on.

引用

页数：2

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