Translational Actuator for Precision Positioning with High Speed Motion

被引：0
|
作者：
Mori, Shigeki [1 ]
Sakurada, Akira [1 ]
Naganawa, Akihiro [2 ]
Shibuya, Yotsugi [2 ]
Obinata, Goro [3 ]
机构：
[1] AIT Akita Ind Technol Ctr, 4-21 Sanuki, Araya, Akita 0101623, Japan
[2] Akita Univ, Dept Mech Engn, Fac Engn & Resource Sci, Akita 0108502, Japan
[3] Nagoya Univ, EcoTopia Sci Inst, Chikusa Ku, Nagoya, Aichi 4648603, Japan
来源：
2012 DIGEST ASIA-PACIFIC MAGNETIC RECORDING CONFERENCE (APMRC) | 2012年
关键词：
actuator; staked piezoelectric element; translation mechanism; scanning probe microscope (SPM); elastic hinge; stage;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
Precision positioning actuators with high speed motion are demanded in the field of manufacturing inspections for semiconductor and flat display areas, and so on. The authors called "Nano-Motion Actuator (NMA)" which consisted of a displacement-amplifying mechanism and a stacked piezoelectric element [1]. However, its first resonance frequency became limited by displacement amplification. We proposed a new actuator mechanism that is applied translation mechanism for the scanning probe microscope (SPM), and so on.
引用
收藏
页数：2
相关论文
共 50 条
  • [1] Development of Reluctance Actuator for High-Precision Positioning and Scanning Motion
    Burgstaller, Ines
    Ito, Shingo
    Fujimoto, Hiroshi
    Schitter, Georg
    2021 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS (ICM), 2021,
  • [2] Research on a slender piezoelectric micro-motion actuator and its application for high-speed and high-precision positioning
    Lu, Fei
    Chen, Weishan
    Deng, Jie
    Zhang, Shijing
    Liu, Yingxiang
    SENSORS AND ACTUATORS A-PHYSICAL, 2025, 384
  • [3] Dynamic design of high speed precision positioning system
    Zhao, Xingyu
    Wu, Yimin
    Zhang, Dawei
    2007 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, VOLS I-V, CONFERENCE PROCEEDINGS, 2007, : 1028 - 1032
  • [4] Piezoelectric/actuator - Application to precision positioning
    Seimitsu Kogaku Kaishi, 2006, 4 (449-452):
  • [5] Nano-Motion Stage for High-Speed and Precision Positioning on an X-Y Plane
    Mori, Shigeki
    Sato, Yuudai
    Sakurada, Akira
    Naganawa, Akihiro
    Shibuya, Yotsugi
    Obinata, Goro
    IEEE TRANSACTIONS ON MAGNETICS, 2009, 45 (11) : 4972 - 4978
  • [6] Hybrid actuator for high speed and high precision optical disk drives
    Park, KH
    Choi, CH
    Ryu, J
    MECHATRONICS, 2001, 11 (05) : 527 - 543
  • [7] Vibration error compensation of high speed and high precision positioning platform
    Liu, Ji-Zhu
    Zhang, Wen-Wen
    Li, Jian
    Chen, Li-Guo
    Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2015, 23 : 328 - 334
  • [8] A linear actuator for precision positioning of dual objects
    Peng, Yuxin
    Cao, Jie
    Guo, Zhao
    Yu, Haoyong
    SMART MATERIALS AND STRUCTURES, 2015, 24 (12)
  • [9] Design and test of a precision positioning actuator for QTT
    Xiang BinBin
    Peng HaiBo
    Wang Na
    Li Tong
    Chen MaoZheng
    Xu Qian
    SCIENTIA SINICA-PHYSICA MECHANICA & ASTRONOMICA, 2019, 49 (09)
  • [10] Precision positioning using a microfabricated electrostatic actuator
    Horsley, DA
    Wongkomet, N
    Horowitz, R
    Pisano, AP
    IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (02) : 993 - 999
12345