Non-ablative texturing of silicon surface with a continuous wave fiber laser

被引：17

作者：

Farrokhi, H. ^{[1
]}

Zhou, Wei ^{[1
,2
,3
]}

Zheng, H. Y. ^{[2
]}

Li, Z. L. ^{[2
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore

[2] Singapore Inst Mfg Technol, Machining Technol Grp, Singapore 638075, Singapore

[3] Hefei Univ Technol, Coll Mat Sci & Engn, Hefei 230009, Peoples R China

来源：

OPTICS EXPRESS | 2012年 / 20卷 / 21期

关键词：

MICROSTRUCTURES;

D O I：

10.1364/OE.20.023180

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Laser surface texturing based on ablation has been widely used, but hardly any reports can be found on non-ablative laser surface texturing. Silicon is highly transparent to the infrared wavelength of fiber laser (lambda = 1090 nm) and thus regarded as an unsuitable tool for the purpose of surface texturing. However, we succeeded in using a continuous wave fiber laser to produce regular arrays of sub-micron bumps on silicon surface. The approach is shown to be based on laser-induced oxidation of silicon. (C)2012 Optical Society of America

引用

页码：23180 / 23185

页数：6

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