Non-ablative texturing of silicon surface with a continuous wave fiber laser

被引:17
|
作者
Farrokhi, H. [1 ]
Zhou, Wei [1 ,2 ,3 ]
Zheng, H. Y. [2 ]
Li, Z. L. [2 ]
机构
[1] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore
[2] Singapore Inst Mfg Technol, Machining Technol Grp, Singapore 638075, Singapore
[3] Hefei Univ Technol, Coll Mat Sci & Engn, Hefei 230009, Peoples R China
来源
OPTICS EXPRESS | 2012年 / 20卷 / 21期
关键词
MICROSTRUCTURES;
D O I
10.1364/OE.20.023180
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Laser surface texturing based on ablation has been widely used, but hardly any reports can be found on non-ablative laser surface texturing. Silicon is highly transparent to the infrared wavelength of fiber laser (lambda = 1090 nm) and thus regarded as an unsuitable tool for the purpose of surface texturing. However, we succeeded in using a continuous wave fiber laser to produce regular arrays of sub-micron bumps on silicon surface. The approach is shown to be based on laser-induced oxidation of silicon. (C)2012 Optical Society of America
引用
收藏
页码:23180 / 23185
页数:6
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