Research on mechanism of DOE influence on Fractal Nano-Dimensional Films production - art. no. 625113

被引：0

作者：

Zhabrev, Valentin A. ^{[1
]}

Lukyanov, Gennady N. ^{[1
]}

Margolin, Vladimir I. ^{[1
]}

Potekhin, Maxim S. ^{[1
]}

Serov, Igor N. ^{[1
]}

Soltovskaya, Inga A. ^{[1
]}

Tupik, Viktor A. ^{[1
]}

机构：

[1] RAS, Inst Silicate Chem, St Petersburg, Russia

来源：

Lasers for Measurements and Information Transfer 2005 | 2005年 / 6251卷

关键词：

fractal- matrix topology; Strukturizator "Aires; nano-dimensional structure; magnetron ionic - plasma spattering; scanning electron microscopy; atomic-force microscopy;

D O I：

10.1117/12.677738

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

This work is dedicated to present-day state of nanotechnology and researches on methods of fractal structures production and spheres of its application. The experimental and theoretical researches on Fractal Nano-Dimensional Films production are carried out and the received results are discussed.

引用

页码：25113 / 25113

页数：8

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