Research on mechanism of DOE influence on Fractal Nano-Dimensional Films production - art. no. 625113

被引：0
|
作者：
Zhabrev, Valentin A. [1 ]
Lukyanov, Gennady N. [1 ]
Margolin, Vladimir I. [1 ]
Potekhin, Maxim S. [1 ]
Serov, Igor N. [1 ]
Soltovskaya, Inga A. [1 ]
Tupik, Viktor A. [1 ]
机构：
[1] RAS, Inst Silicate Chem, St Petersburg, Russia
来源：
Lasers for Measurements and Information Transfer 2005 | 2005年 / 6251卷
关键词：
fractal- matrix topology; Strukturizator "Aires; nano-dimensional structure; magnetron ionic - plasma spattering; scanning electron microscopy; atomic-force microscopy;
D O I：
10.1117/12.677738
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This work is dedicated to present-day state of nanotechnology and researches on methods of fractal structures production and spheres of its application. The experimental and theoretical researches on Fractal Nano-Dimensional Films production are carried out and the received results are discussed.
引用
收藏
页码：25113 / 25113
页数：8
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