Interface heterogeneity of periodic multilayer mirrors investigated by X-ray fluorescence, scattering spectroscopy, and mathematical methods of statistics

被引：3
|
作者：
Mazuritskiy, Mikhail, I [1 ]
Kozakov, Alexey T. [2 ]
Kumar, Niranjan [3 ]
Smertin, Ruslan M. [3 ]
Garakhin, Sergei A. [3 ]
Polkovnikov, Vladimir N. [3 ]
Chkhalo, Nikolay, I [3 ]
机构：
[1] Southern Fed Univ, Fac Phys, Sorge Str 5, Rostov Na Donu 344090, Russia
[2] Southern Fed Univ, Res Inst Phys, 194 Stachki Ave, Rostov Na Donu 344090, Russia
[3] RAS, Inst Phys Microstruct, Afonino 603087, Nizhny Novgorod, Russia
来源：
SURFACES AND INTERFACES | 2022年 / 33卷
关键词：
Multilayer X-ray mirrors; X-ray optics; Micro -X-ray fluorescent analysis; X-ray photoelectron spectroscopy; Degree of surface homogeneity; OPTICS; INTERFERENCE; FABRICATION; REFLECTION;
D O I：
10.1016/j.surfin.2022.102258
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Multilayer interference structures (X-ray mirrors) based on the alternating layers of Mo/Si and W/Si were investigated using laboratory X-ray micro-fluorescence analysis (micro-XFA) and statistical analysis. The physics of interaction processes of primary X-ray radiation scattered on the surface of multilayer periodic structures have been studied. Using the X-ray spectroscopy together with the mathematical methods of statistics made it possible to evaluate a degree of homogeneity and to compare the chemical compositions of different samples of the multilayer mirrors. A correlation between the statistical characteristics of bimodal frequency distribution and the reflectivity properties of X-ray mirrors for the scattered radiation has been revealed. The frequency distributions of mathematical statistics for experimentally collected intensities of the scattered Rh K alpha radiation indicate the depth heterogeneity of the studied samples. Used in this work approach gives a new strategy for testing to improve of efficiency of X-ray mirrors based on the multilayer nanoscale structures.
引用
收藏
页数：10
相关论文
共 50 条
  • [31] Total-electron-yield x-ray standing-wave measurements of multilayer x-ray mirrors for the interface structure evaluation
    Muramatsu, Y
    Takenaka, H
    Gullikson, EM
    Perera, RCC
    MICROPROCESSES AND NANOTECHNOLOGY 2001, DIGEST OF PAPERS, 2001, : 66 - 66
  • [32] Total-electron-yield X-ray standing-wave measurements of multilayer X-ray mirrors for interface structure evaluation
    Muramatsu, Y
    Takenaka, H
    Gullikson, EM
    Perera, RCC
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (6B): : 4250 - 4252
  • [33] Scattering of hard synchrotron radiation from a nonideal surface grating of multilayer X-ray mirrors
    Punegov, V.I.
    Nesterets, Ya.I.
    Mytnichenko, S.V.
    Kovalenko, N.V.
    Chernov, V.A.
    Poverkhnost Rentgenovskie Sinkhronnye i Nejtronnye Issledovaniya, 2003, (01): : 58 - 65
  • [34] Calculation of the Reflection Coefficient of Multilayer X-Ray Mirrors for Sources Based on Inverse Compton Scattering
    Morozov, S. S.
    Garakhin, S. A.
    Chkhalo, N. I.
    JOURNAL OF SURFACE INVESTIGATION, 2023, 17 (SUPPL 1): : S250 - S258
  • [35] Calculation of the Reflection Coefficient of Multilayer X-Ray Mirrors for Sources Based on Inverse Compton Scattering
    S. S. Morozov
    S. A. Garakhin
    N. I. Chkhalo
    Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2023, 17 : S250 - S258
  • [36] Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering
    Siffalovic, P.
    Majkova, E.
    Chitu, L.
    Jergel, M.
    Luby, S.
    Keckes, J.
    Maier, G.
    Timmann, A.
    Roth, S. V.
    Tsuru, T.
    Harada, T.
    Yamamoto, M.
    Heinzmann, U.
    VACUUM, 2009, 84 (01) : 19 - 25
  • [37] X-ray scattering and fluorescence spectroscopy as a possible tool for KVp monitoring
    Krmar, M.
    Shtykov, A.
    Ganezer, K.
    Ma, G.
    MEDICAL PHYSICS, 2007, 34 (06) : 2350 - 2350
  • [38] Design and fabrication of X-ray non-periodic multilayer mirrors: Apodization and shaping of their spectral response
    Bridou, F.
    Delmotte, F.
    Troussel, Ph.
    Villette, B.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2012, 680 : 69 - 74
  • [39] Aluminum impurities in silicon: Investigation of x-ray Raman scattering in total reflection x-ray fluorescence spectroscopy
    Baur, K
    Kerner, J
    Brennan, S
    Singh, A
    Pianetta, P
    JOURNAL OF APPLIED PHYSICS, 2000, 88 (08) : 4642 - 4647
  • [40] Growth Pathway of CdS Nanoplatelets Investigated by In Situ X-ray Scattering and Optical Spectroscopy
    Qian, Kun
    Xu, Haohui
    Zhao, Zhuo
    Xu, Xiaozhi
    Wang, Jiaqi
    Li, Yan
    Pu, Chaodan
    Zeng, Jianrong
    JOURNAL OF PHYSICAL CHEMISTRY LETTERS, 2025, 16 (06): : 1507 - 1514
12345