Interface heterogeneity of periodic multilayer mirrors investigated by X-ray fluorescence, scattering spectroscopy, and mathematical methods of statistics

被引：3
|
作者：
Mazuritskiy, Mikhail, I [1 ]
Kozakov, Alexey T. [2 ]
Kumar, Niranjan [3 ]
Smertin, Ruslan M. [3 ]
Garakhin, Sergei A. [3 ]
Polkovnikov, Vladimir N. [3 ]
Chkhalo, Nikolay, I [3 ]
机构：
[1] Southern Fed Univ, Fac Phys, Sorge Str 5, Rostov Na Donu 344090, Russia
[2] Southern Fed Univ, Res Inst Phys, 194 Stachki Ave, Rostov Na Donu 344090, Russia
[3] RAS, Inst Phys Microstruct, Afonino 603087, Nizhny Novgorod, Russia
来源：
SURFACES AND INTERFACES | 2022年 / 33卷
关键词：
Multilayer X-ray mirrors; X-ray optics; Micro -X-ray fluorescent analysis; X-ray photoelectron spectroscopy; Degree of surface homogeneity; OPTICS; INTERFERENCE; FABRICATION; REFLECTION;
D O I：
10.1016/j.surfin.2022.102258
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Multilayer interference structures (X-ray mirrors) based on the alternating layers of Mo/Si and W/Si were investigated using laboratory X-ray micro-fluorescence analysis (micro-XFA) and statistical analysis. The physics of interaction processes of primary X-ray radiation scattered on the surface of multilayer periodic structures have been studied. Using the X-ray spectroscopy together with the mathematical methods of statistics made it possible to evaluate a degree of homogeneity and to compare the chemical compositions of different samples of the multilayer mirrors. A correlation between the statistical characteristics of bimodal frequency distribution and the reflectivity properties of X-ray mirrors for the scattered radiation has been revealed. The frequency distributions of mathematical statistics for experimentally collected intensities of the scattered Rh K alpha radiation indicate the depth heterogeneity of the studied samples. Used in this work approach gives a new strategy for testing to improve of efficiency of X-ray mirrors based on the multilayer nanoscale structures.
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页数：10
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