SAW signal conditioner-based dynamic capacitive sensor for high-speed gap measurement

被引：6
|
作者：
Kim, J. -G. [1 ]
Lee, T-J. [2 ]
Park, N. -C. [1 ]
Park, Y. -P. [1 ]
Park, K. -S. [1 ]
机构：
[1] Yonsei Univ, Dept Mech Engn, Seoul 120749, South Korea
[2] ITF Co Ltd, Bucheon 421740, Gyonggi Do, South Korea
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2013年 / 189卷
基金：
新加坡国家研究基金会;
关键词：
Capacitive sensor; Dynamic measurement; SAW; Amplitude modulation; Gap measurement; ACOUSTIC-WAVE DEVICE;
D O I：
10.1016/j.sna.2012.09.017
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
High-speed gap measurement in the nano/micrometer range presents unique engineering challenges. A signal conditioner is required for capacitive sensors to amplify, denoise, and restrict the bandwidth. In this work, a capacitive sensor was used in combination with a SAW device that serves as a signal conditioner. The proposed system provides 2.75 MHz bandwidth through amplitude modulation using the center frequency of the SAW device as a carrier signal and has outstanding signal conditioning capabilities. Construction and characterization of a SAW-based capacitive gap sensor to measure a 200 Hz gap frequency are described. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：204 / 211
页数：8
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