SAW signal conditioner-based dynamic capacitive sensor for high-speed gap measurement

被引：6

作者：

Kim, J. -G. ^{[1
]}

Lee, T-J. ^{[2
]}

Park, N. -C. ^{[1
]}

Park, Y. -P. ^{[1
]}

Park, K. -S. ^{[1
]}

机构：

[1] Yonsei Univ, Dept Mech Engn, Seoul 120749, South Korea

[2] ITF Co Ltd, Bucheon 421740, Gyonggi Do, South Korea

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2013年 / 189卷

基金：

新加坡国家研究基金会;

关键词：

Capacitive sensor; Dynamic measurement; SAW; Amplitude modulation; Gap measurement; ACOUSTIC-WAVE DEVICE;

D O I：

10.1016/j.sna.2012.09.017

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High-speed gap measurement in the nano/micrometer range presents unique engineering challenges. A signal conditioner is required for capacitive sensors to amplify, denoise, and restrict the bandwidth. In this work, a capacitive sensor was used in combination with a SAW device that serves as a signal conditioner. The proposed system provides 2.75 MHz bandwidth through amplitude modulation using the center frequency of the SAW device as a carrier signal and has outstanding signal conditioning capabilities. Construction and characterization of a SAW-based capacitive gap sensor to measure a 200 Hz gap frequency are described. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：204 / 211

页数：8

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