Fabrication of Millimeter-Wave PTFE-Filled Waveguide Using SR Direct Etching

被引：0
|
作者：
Kishihara, Mitsuyoshi [1 ]
Ukita, Yoshiaki [2 ]
Yamamoto, Shigeaki [2 ]
Utsumi, Yuichi [2 ]
Ohta, Isao [3 ]
机构：
[1] Okayama Prefectural Univ, Fac Comp Sci & Syst Engn, Okayama 7191197, Japan
[2] Univ Hyogo, Lab Adv Sci & Technol Ind, Kobe, Hyogo 6500044, Japan
[3] Univ Hyogo, Sch Engn, Grad Sch Engn, Himeji, Hyogo 6712201, Japan
来源：
2007 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5 | 2007年
基金：
日本学术振兴会;
关键词：
Millimeter-wave; Waveguide; SR etching; Waveguide bend; Microdevice;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A metallic waveguide is one of effective media guiding a millimeter- and submillimeter-wave because of the advantage of low loss. In this paper, trial fabrication of a PTFE-filled rectangular waveguide for millimeter-wave components is attempted with the use of the SR direct etching process, sputter deposition of metal, and electroplating. The fabrication procedure for the PTFE-filled waveguide is described and the measured frequency characteristics of the PM-filled waveguide mitered bends are shown.
引用
收藏
页码：1354 / +
页数：2
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