High quality PTFE film formed by SR direct etching

被引：0
|
作者：
Zhang, Yanping [1 ]
机构：
[1] Sumitomo Heavy Industries, Ltd., Japan
来源：
Yosetsu Gakkai Shi/Journal of the Japan Welding Society | 2002年 / 71卷 / 03期
关键词：
D O I：
10.2207/qjjws1943.71.157
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学科分类号：
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页码：27 / 29
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