Continuous-membrane surface-micromachined silicon deformable mirror

被引：101
|
作者：
Bifano, TG
Mali, RK
Dorton, JK
Perreault, J
Vandelli, N
Horenstein, MN
Castanon, DA
机构：
[1] Boston University, College of Engineering, Boston
[2] Boston University, Prec. Eng. Research Laboratory
[3] University of California, Berkeley, CA
[4] Spire Corporation, Bedford, MA
[5] Dept. of Elec. and Comp. Engineering, Boston University
[6] Boston University, Micro-opto-mechanical Systems Team
[7] ALPHATECH, Inc., Burlington, MA
来源：
OPTICAL ENGINEERING | 1997年 / 36卷 / 05期
关键词：
micro-opto-electro-mechanical systems; deformable mirror; surface-micromachined; adaptive optics;
D O I：
10.1117/1.601598
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mimer was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces. (C) 1997 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码：1354 / 1360
页数：7
相关论文
共 50 条
  • [31] A continuous single-crystal-silicon membrane deformable mirror using bimorph spring
    Wu, Tong
    Sasaki, Takashi
    Akiyama, Masayuki
    Hane, Kazuhiro
    MEMS ADAPTIVE OPTICS VII, 2013, 8617
  • [32] A micromachined deformable mirror for adaptive optics
    Schwartz, W
    Divoux, C
    Margail, J
    Jocou, L
    Charton, J
    Stadler, E
    Jager, T
    Casset, F
    Enot, T
    MOEMS AND MINATURIZED SYSTEMS III, 2003, 4983 : 285 - 296
  • [33] Surface-micromachined components for articulated microrobots
    Yeh, R
    Kruglick, EJJ
    Pister, KSJ
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1996, 5 (01) : 10 - 17
  • [34] Surface-micromachined photonic integrated circuits
    Wu, MC
    2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, 2000, : 3 - 4
  • [35] Surface-micromachined microoptical elements and systems
    Muller, RS
    Lau, KY
    PROCEEDINGS OF THE IEEE, 1998, 86 (08) : 1705 - 1720
  • [36] A fully surface-micromachined piezoelectric accelerometer
    DeVoe, DL
    Pisano, AP
    TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 1205 - 1208
  • [37] A Surface-Micromachined Levitating MEMS Speaker
    Verreault, Antoine
    Cicek, Paul-Vahe
    Robichaud, Alexandre
    2022 20TH IEEE INTERREGIONAL NEWCAS CONFERENCE (NEWCAS), 2022, : 134 - 138
  • [38] A surface-micromachined shear stress imager
    Jiang, FK
    Tai, YC
    Gupta, B
    Goodman, R
    NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, : 110 - 115
  • [39] Modelling surface-micromachined electrothermal actuators
    Johnstone, RW
    Parameswaran, M
    CANADIAN JOURNAL OF ELECTRICAL AND COMPUTER ENGINEERING-REVUE CANADIENNE DE GENIE ELECTRIQUE ET INFORMATIQUE, 2004, 29 (03): : 193 - 202
  • [40] A surface-micromachined vertical scanning micromirror
    Lee, Ki Bang
    Lin, Liwei
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (07) : 1394 - 1401
12345