A miniaturized Orbitron pump for vacuum Nanoelectronics

被引：0

作者：

Koops, Hans W. P. ^{[1
]}

机构：

[1] HaWilKo PSS Germany, D-64372 Ober Ramstadt, Germany

来源：

2007 IEEE 20TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE | 2007年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：195 / 195

页数：1

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