A miniaturized Orbitron pump for vacuum Nanoelectronics

被引：0
|
作者：
Koops, Hans W. P. [1 ]
机构：
[1] HaWilKo PSS Germany, D-64372 Ober Ramstadt, Germany
来源：
2007 IEEE 20TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE | 2007年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：195 / 195
页数：1
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