A miniaturized Orbitron pump for vacuum Nanoelectronics

被引：0
|
作者：
Koops, Hans W. P. [1 ]
机构：
[1] HaWilKo PSS Germany, D-64372 Ober Ramstadt, Germany
来源：
2007 IEEE 20TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE | 2007年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：195 / 195
页数：1
相关论文
共 50 条
  • [1] ORBITRON VACUUM PUMP
    DOUGLAS, RA
    ZABRITSKI, J
    HERB, RG
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1965, 36 (01): : 1 - &
  • [2] Proposal of a miniaturized Orbitron pump for MEMS applications
    Koops, HWP
    Nanotechnology II, 2005, 5838 : 38 - 42
  • [3] EFFECT OF MERCURY VAPOUR ON AN ORBITRON VACUUM PUMP
    CROSS, JD
    VACUUM, 1966, 16 (10) : 538 - &
  • [4] ORBITRON ION PUMP
    SZALMA, G
    STUDII SI CERCETARI DE FIZICA, 1973, 25 (05): : 633 - 636
  • [5] CHARACTERISTICS OF ORBITRON PUMP
    KATO, S
    NOJIRI, M
    OIKAWA, H
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, : A854 - A854
  • [6] Study of the work of a getter-ion ultrahigh-vacuum orbitron pump
    Loboda, V..
    Zhmailov, V.N.
    Dovzhyk, M.Ya.
    Khursenko, S.N.
    Chepizhnyi, A.V.
    Applied Physics, 2021, (01): : 75 - 81
  • [7] ORBITRON PUMP FOR MASS SPECTROMETERS
    SAMSONOV, GA
    SYSOEV, AA
    KUTSURUBA, VI
    KALININ, YT
    FILATOV, VN
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1979, 22 (01) : 174 - 176
  • [8] ORBITRON PUMP WITH NITROGEN CRYOPANEL
    Loboda, V.
    Zubko, V.
    Khursenko, S.
    Kravchenko, V.
    Chepizhnyi, A.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2024, (01): : 38 - 43
  • [9] NEW MODIFIED ORBITRON PUMP
    NAIK, PK
    VERMA, SL
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, : 73 - 76
  • [10] 3-D PRINTED MINIATURIZED DIAPHRAGM VACUUM PUMP
    Taylor, Anthony P.
    Velasquez-Garca, Luis F.
    30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017, : 1292 - 1295
12345