共 50 条
- [42] New spin-on oxycarbosilane low-k dielectric materials with exceptional mechanical properties PROCEEDINGS OF THE IEEE 2005 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2005, : 226 - 228
- [43] Reliability of MSQ spin-on glass as low-k interlayer dielectric in VLSI device 2004 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2004, : 1 - 4
- [44] FABRICATION OF 20 % EFFICIENT CELLS USING SPIN-ON BASED SIMULTANEOUS DIFFUSION AND DIELECTRIC ANNEAL 2009 34TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, VOLS 1-3, 2009, : 2087 - +
- [45] Dielectric constant trends in silicate spin-on glasses - art. no. 66452A Nanoengineering: Fabrication, Properties, Optics, and Devices IV, 2007, 6645 : A6452 - A6452
- [46] The pore structure and its impacts on property and performance of a spin-on porous low k dielectric ADVANCED METALLIZATION CONFERENCE 2003 (AMC 2003), 2004, : 531 - 536
- [47] Etching spin-on trilayer masks ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXV, PTS 1 AND 2, 2008, 6923
- [48] Nippy spin-on semi films INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS, 2004, 34 (02): : 127 - 128
- [49] Characterization of spin-on glasses by microindentation LOW-DIELECTRIC CONSTANT MATERIALS IV, 1998, 511 : 157 - 164