AlliedSignal touts spin-on dielectric

被引：0
|
作者：
不详
机构：
来源：
SOLID STATE TECHNOLOGY | 1997年 / 40卷 / 11期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：42 / 42
页数：1
相关论文
共 50 条
  • [21] TSV Liner Dielectric Technology with Spin-on Low-k Polymer
    Lee, S.
    Sugawara, Y.
    Ito, M.
    Kino, H.
    Fukushima, T.
    Tanaka, T.
    2018 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING AND IMAPS ALL ASIA CONFERENCE (ICEP-IAAC), 2018, : 346 - 349
  • [22] The race is on:: CVD and spin-on vie for the low-k dielectric market
    Corbett, M
    Davis, JC
    SOLID STATE TECHNOLOGY, 2001, 44 (10) : 40 - +
  • [23] New reflowable organic spin-on glass for advanced interlevel dielectric planarization
    Furusawa, T.
    Homma, Y.
    Shimamura, Y.
    Morishima, H.
    Yamamoto, Y.
    Satoh, H.
    Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi), 1995, 78 (10): : 65 - 72
  • [24] Determination of thermal activation energy of spin-on MSQ used as interlayer dielectric
    Aw, KC
    Ibrahim, K
    2002 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2002, : 36 - 38
  • [25] PTFE nanoemulsions as spin-on, low dielectric constant materials for ULSI applications
    Rosenmayer, T
    Wu, H
    ADVANCED METALLIZATION FOR FUTURE ULSI, 1996, 427 : 463 - 468
  • [26] New reflowable organic spin-on glass for advanced interlevel dielectric planarization
    Furusawa, T
    Homma, Y
    Shimamura, Y
    Morishima, H
    Yamamoto, Y
    Satoh, H
    ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS, 1995, 78 (10): : 65 - 72
  • [27] Organic and Inorganic Spin-On Polymers for Low-Dielectric-Constant Applications
    Nigel P. Hacker
    MRS Bulletin, 1997, 22 : 33 - 38
  • [28] Addressing the challenges of spin-on low-k dielectric dispense management
    2001, Canon Communications LLC (19):
  • [29] Organic and inorganic spin-on polymers for low-dielectric-constant applications
    Hacker, NP
    MRS BULLETIN, 1997, 22 (10) : 33 - 38
  • [30] Amorphous silicon thin film transistor with spin-on organic dielectric material
    Liu, Shun-Feng
    Ting, Hung-Che
    Chen, Chi-Wei
    Huang, Chung-Yao
    Tsai, Tung-Chang
    Cheng, Chun-Cheng
    Chang, Chung-Shu
    Lee, Cheng-Chung
    Hshiao, Ming-Nan
    IDMC 05: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2005, 2005, : 433 - 435
12345