RF plasma parameter determination by a Langmuir multipoint double probe array

被引：0

作者：

Rojas-Olmedo, I. A. ^{[1
]}

Lopez-Callejas, R. ^{[1
,2
]}

de la Piedad-Beneitez, A. ^{[1
]}

Valencia-Alvarado, R. ^{[2
]}

Pena-Eguiluz, R. ^{[2
]}

Mercado-Cabrera, A. ^{[2
]}

Barocio, S. R. ^{[2
]}

Munoz-Castro, A. E. ^{[2
]}

Rodriguez-Mendez, B. G. ^{[2
]}

机构：

[1] Inst Tecnol Toluca, AP 890, Toluca, Estado De Mexic, Mexico

[2] Ist Nacl Investigaciones Nucl, Plasma Phys Lab, Mexico City, DF, Mexico

来源：

14TH LATIN AMERICAN WORKSHOP ON PLASMA PHYSICS (LAWPP 2011) | 2012年 / 370卷

关键词：

DISCHARGES; SINGLE;

D O I：

10.1088/1742-6596/370/1/012055

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A multipoint double Langmuir (MDL) probe system, which is exempt from interference, has been designed and assembled to be applied to an RF plasma. The system provides the measurement of fundamental plasma parameters such as density, temperature, plasma potential, etc. on the basis of the Bohm Approximation Theory and the Orbital Movement Limit. Thus, one pair of the MDL system is selected so as to consider the right plasma parameters within the prevailing pressure-power intervals. Both the hardware and software of the system have been applied to the modification of material properties by means of the PIII process.

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页数：5

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