RF plasma parameter determination by a Langmuir multipoint double probe array

被引：0

作者：

Rojas-Olmedo, I. A. ^{[1
]}

Lopez-Callejas, R. ^{[1
,2
]}

de la Piedad-Beneitez, A. ^{[1
]}

Valencia-Alvarado, R. ^{[2
]}

Pena-Eguiluz, R. ^{[2
]}

Mercado-Cabrera, A. ^{[2
]}

Barocio, S. R. ^{[2
]}

Munoz-Castro, A. E. ^{[2
]}

Rodriguez-Mendez, B. G. ^{[2
]}

机构：

[1] Inst Tecnol Toluca, AP 890, Toluca, Estado De Mexic, Mexico

[2] Ist Nacl Investigaciones Nucl, Plasma Phys Lab, Mexico City, DF, Mexico

来源：

14TH LATIN AMERICAN WORKSHOP ON PLASMA PHYSICS (LAWPP 2011) | 2012年 / 370卷

关键词：

DISCHARGES; SINGLE;

D O I：

10.1088/1742-6596/370/1/012055

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A multipoint double Langmuir (MDL) probe system, which is exempt from interference, has been designed and assembled to be applied to an RF plasma. The system provides the measurement of fundamental plasma parameters such as density, temperature, plasma potential, etc. on the basis of the Bohm Approximation Theory and the Orbital Movement Limit. Thus, one pair of the MDL system is selected so as to consider the right plasma parameters within the prevailing pressure-power intervals. Both the hardware and software of the system have been applied to the modification of material properties by means of the PIII process.

引用

页数：5

共 50 条

[21] Examination of an ICP magnesium plasma by spectroscopy and double Langmuir probe measurements
Burm, K. T. A. L.
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2012, 58 (03):
[22] The Research of Measuring Plasma Parameters with Internal Double Langmuir Probe in Galatea
Tong Weiming
Jin Xianji
Li Zhongwei
Zheng Menghui
PROCEEDINGS 2016 EIGHTH INTERNATIONAL CONFERENCE ON MEASURING TECHNOLOGY AND MECHATRONICS AUTOMATION ICMTMA 2016, 2016, : 829 - 833
[23] COMPARISON OF LANGMUIR DOUBLE PROBE AND LASER SCATTERING MEASUREMENTS OF PLASMA PARAMETERS
IRISAWA, J
JOHN, PK
REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (08): : 1021 - 1023
[24] RF harmonic suppression in Langmuir probe measurements in RF discharges
Flender, U
Thi, BHN
Wiesemann, K
Khromov, NA
Kolokolov, NB
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1996, 5 (01): : 61 - 69
[25] A SELF-COMPENSATING LANGMUIR PROBE FOR USE IN RF (13.56 MHZ) PLASMA SYSTEMS
CHATTERTON, PA
REES, JA
WU, WL
ALASSADI, K
VACUUM, 1991, 42 (07) : 489 - 493
[26] Compact power detection probe for the RF plasma heating waveguide array
Kung, CC
Bernabei, S
Gumbas, J
Greenough, N
Fredd, E
Wilson, JR
Hosea, J
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2005, 33 (02) : 969 - 975
[27] Computational technique for plasma parameters determination using Langmuir probe data
Negrea, C.
Manea, V.
Covlea, V.
Jipa, A.
PLASMA PHYSICS REPORTS, 2011, 37 (05) : 455 - 460
[28] Computational technique for plasma parameters determination using Langmuir probe data
C. Negrea
V. Manea
V. Covlea
A. Jipa
Plasma Physics Reports, 2011, 37 : 455 - 460
[29] Langmuir probe and spectroscopic studies of RF generated helium-nitrogen mixture plasma
Naveed, M. A.
Rehman, N. U.
Zeb, S.
Hussain, S.
Zakaullah, M.
EUROPEAN PHYSICAL JOURNAL D, 2008, 47 (03): : 395 - 402
[30] Spatial Evolution Study of EEDFs and Plasma Parameters in RF Stochastic Regime by Langmuir Probe
Djelloul MENDIL
Hadj LAHMAR
Laifa BOUFENDI
Plasma Science and Technology, 2014, (09) : 837 - 842

← 1 2 3 4 5 →