A rod-shaped vibro touch sensor using PZT thin film

被引：22
|
作者：
Kanda, T [1 ]
Morita, T [1 ]
Kurosawa, RK [1 ]
Higuchi, T [1 ]
机构：
[1] Univ Tokyo, Grad Sch Engn, Dept Precis Machinery Engn, Bunkyo Ku, Tokyo 1138656, Japan
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1999年 / 46卷 / 04期
关键词：
D O I：
10.1109/58.775653
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin film was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.
引用
收藏
页码：875 / 882
页数：8
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