A rod-shaped vibro touch sensor using PZT thin film

被引：22

作者：

Kanda, T ^{[1
]}

Morita, T ^{[1
]}

Kurosawa, RK ^{[1
]}

Higuchi, T ^{[1
]}

机构：

[1] Univ Tokyo, Grad Sch Engn, Dept Precis Machinery Engn, Bunkyo Ku, Tokyo 1138656, Japan

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1999年 / 46卷 / 04期

关键词：

D O I：

10.1109/58.775653

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin film was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.

引用

页码：875 / 882

页数：8

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