In-plane photonic transduction of silicon-on-insulator microcantilevers

被引：34
|
作者：
Noh, Jong Wook [1 ]
Anderson, Ryan [1 ]
Kim, Seunghyun [1 ]
Cardenas, Jaime
Nordin, Gregory P. [1 ]
机构：
[1] Brigham Young Univ, Dept Elect & Comp Engn, Provo, UT 84602 USA
来源：
OPTICS EXPRESS | 2008年 / 16卷 / 16期
关键词：
D O I：
10.1364/OE.16.012114
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We demonstrate an in-plane photonic transduction method for microcantilevers, which have been widely investigated for sensor applications. In our approach the microcantilever is etched to form a single mode rib waveguide. Light propagates down the microcantilever and crosses a small gap at the free end of the microcantilever, some of which is captured by an asymmetrical multimode waveguide that terminates in a Y-branch. The Y-branch outputs are used to form a differential signal that is monotonically dependent on microcantilever deflection. The measured differential signal matches simulation when microcantilever rotation is properly accounted for. The measured differential signal sensitivity is 1.4 x 10(-4) nm(-1) and the minimum detectable deflection is 0.35 nm. (C) 2008 Optical Society of America.
引用
收藏
页码：12114 / 12123
页数：10
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