A terraced scanning superconducting quantum interference device susceptometer with submicron pickup loops

被引：56

作者：

Koshnick, Nicholas C. ^{[1
,2
]}

Huber, Martin E. ^{[3
,4
]}

Bert, Julie A. ^{[1
,2
]}

Hicks, Clifford W. ^{[1
,2
]}

Large, Jeff ^{[5
]}

Edwards, Hal ^{[5
]}

Moler, Kathryn A. ^{[3
,4
]}

机构：

[1] Stanford Univ, Dept Phys, Stanford, CA 94305 USA

[2] Stanford Univ, Dept Appl Phys, Stanford, CA 94305 USA

[3] Univ Colorado Denver, Dept Phys, Denver, CO 80217 USA

[4] Univ Colorado Denver, Dept Elect Engn, Denver, CO 80217 USA

[5] Texas Instruments Inc, Circuit Design Repair Lab, Dallas, TX 75243 USA

来源：

APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 24期

基金：

美国国家科学基金会;

关键词：

focused ion beam technology; lithography; magnetic susceptibility; magnetic variables measurement; SQUID magnetometers;

D O I：

10.1063/1.3046098

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Superconducting quantum interference devices (SQUIDs) can have excellent spin sensitivity depending on their magnetic flux noise, pickup loop diameter, and distance from the sample. We report a family of scanning SQUID susceptometers with terraced tips that position the pickup loops 300 nm from the sample. The 600 nm-2 mu m pickup loops, defined by focused ion beam, are integrated into a 12-layer optical lithography process allowing flux-locked feedback, in situ background subtraction and optimized flux noise. These features enable a sensitivity of similar to 70 electron spins per root hertz at 4 K.

引用

页数：3

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