A terraced scanning superconducting quantum interference device susceptometer with submicron pickup loops

被引:56
|
作者
Koshnick, Nicholas C. [1 ,2 ]
Huber, Martin E. [3 ,4 ]
Bert, Julie A. [1 ,2 ]
Hicks, Clifford W. [1 ,2 ]
Large, Jeff [5 ]
Edwards, Hal [5 ]
Moler, Kathryn A. [3 ,4 ]
机构
[1] Stanford Univ, Dept Phys, Stanford, CA 94305 USA
[2] Stanford Univ, Dept Appl Phys, Stanford, CA 94305 USA
[3] Univ Colorado Denver, Dept Phys, Denver, CO 80217 USA
[4] Univ Colorado Denver, Dept Elect Engn, Denver, CO 80217 USA
[5] Texas Instruments Inc, Circuit Design Repair Lab, Dallas, TX 75243 USA
基金
美国国家科学基金会;
关键词
focused ion beam technology; lithography; magnetic susceptibility; magnetic variables measurement; SQUID magnetometers;
D O I
10.1063/1.3046098
中图分类号
O59 [应用物理学];
学科分类号
摘要
Superconducting quantum interference devices (SQUIDs) can have excellent spin sensitivity depending on their magnetic flux noise, pickup loop diameter, and distance from the sample. We report a family of scanning SQUID susceptometers with terraced tips that position the pickup loops 300 nm from the sample. The 600 nm-2 mu m pickup loops, defined by focused ion beam, are integrated into a 12-layer optical lithography process allowing flux-locked feedback, in situ background subtraction and optimized flux noise. These features enable a sensitivity of similar to 70 electron spins per root hertz at 4 K.
引用
收藏
页数:3
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