Global simulation of the Czochralski silicon crystal growth in ANSYS FLUENT

被引:32
|
作者
Kirpo, Maksims [1 ]
机构
[1] Bosch Solar Energy AG, D-99310 Arnstadt, Germany
关键词
Computer simulation; Turbulent convection; Czochralski method; Semiconducting Silicon; OXYGEN-TRANSPORT; CONVECTION; DESIGN; FIELD; FLOW; MM;
D O I
10.1016/j.jcrysgro.2013.02.005
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Silicon crystals for high efficiency solar cells are produced mainly by the Czochralski (CZ) crystal growth method. Computer simulations of the CZ process established themselves as a basic tool for optimization of the growth process which allows to reduce production costs keeping high quality of the crystalline material. The author shows the application of the general Computational Fluid Dynamics (CFD) code ANSYS FLUENT to solution of the static two-dimensional (2D) axisymmetric global model of the small industrial furnace for growing of silicon crystals with a diameter of 100 mm. The presented numerical model is self-sufficient and incorporates the most important physical phenomena of the CZ growth process including latent heat generation during crystallization, crystal-melt interface deflection, turbulent heat and mass transport, oxygen transport, etc. The demonstrated approach allows to find the heater power for the specified pulling rate of the crystal but the obtained power values are smaller than those found in the literature for the studied furnace. However, the described approach is successfully verified with the respect to the heater power by its application for the numerical simulations of the real CZ pullers by "Bosch Solar Energy AG". (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:60 / 69
页数:10
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