Advanced phase-modulators for next-generation low-temperature Si film crystallization method

被引：0
|
作者：
Taniguchi, Y. [1 ]
Katou, T. [1 ]
Matsumura, M. [1 ]
机构：
[1] Adv LCD Technol Dev Ctr Co Ltd, Totsuka Ku, Yokohama, Kanagawa 2440817, Japan
来源：
IDW/AD '05: PROCEEDINGS OF THE 12TH INTERNATIONAL DISPLAY WORKSHOPS IN CONJUNCTION WITH ASIA DISPLAY 2005, VOLS 1 AND 2 | 2005年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A phase-modulator having only 'holes' (or 'bumps') on a quartz plate has been found to have insufficient depth-of-focus characteristics. This poor depth-of-focus can be attributed to phase retardation effect. Based on this, two bipolar phase-modulators were developed. The first has a deep depth-of-focus and the second is a single-plate modulator that can generate a two-dimensional light intensity profile. It was confirmed experimentally that the second modulator could grow arrays of large grains with 5-mu m pitch.
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页码：981 / 982
页数：2
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