Energy conservation through water usage reduction in the semiconductor industry

The semiconductor industry uses large amounts of Ultrapure Water (UPW) in the wafer fabrication process. Producing UPW involves energy-intensive operations, such as membrane separations, ultraviolet lamps, and continuous pumping and recirculation systems. Indirect energy costs can also be allocated to steps in the UPW process. Motorola recognizes that by reducing UPW consumption, energy savings will result. Energy conservation can also be achieved by improving the UPW generation process itself and by recycling or reclaiming UPW and other water streams.