Energy conservation through water usage reduction in the semiconductor industry

被引：0

作者：

Mendicino, L ^{[1
]}

McCormack, K ^{[1
]}

Gibson, S ^{[1
]}

Patton, B ^{[1
]}

Lyon, JD ^{[1
]}

Covington, J ^{[1
]}

机构：

[1] Motorola Inc, Austin, TX 78721 USA

来源：

ENVIRONMENTAL ISSUES IN THE ELECTRONICS AND SEMICONDUCTOR INDUSTRIES | 1999年 / 99卷 / 08期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The semiconductor industry uses large amounts of Ultrapure Water (UPW) in the wafer fabrication process. Producing UPW involves energy-intensive operations, such as membrane separations, ultraviolet lamps, and continuous pumping and recirculation systems. Indirect energy costs can also be allocated to steps in the UPW process. Motorola recognizes that by reducing UPW consumption, energy savings will result. Energy conservation can also be achieved by improving the UPW generation process itself and by recycling or reclaiming UPW and other water streams.

引用

页码：193 / 206

页数：14

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