InGaN/GaN LEDs grown on Si(111): dependence of device performance on threading dislocation density and emission wavelength

被引:18
|
作者
Zhu, Dandan [1 ]
McAleese, Clifford [1 ]
Haeberlen, Maik [1 ]
Salcianu, Carmen [1 ]
Thrush, Ted [1 ]
Kappers, Menno [1 ]
Phillips, Andrew [1 ]
Lane, Penelope [2 ]
Kane, Michael [2 ]
Wallis, David [2 ]
Martin, Trevor [2 ]
Astles, Mike [2 ]
Humphreys, Colin [1 ]
机构
[1] Univ Cambridge, Dept Mat Sci & Met, Pembroke St, Cambridge CB2 3QZ, England
[2] QinetiQ, Worcestershire WR13 3PS, England
基金
英国工程与自然科学研究理事会;
关键词
InGaN/GaN; MOVPE; dislocations; LEDs; GAN; SI; SILICON; STRAIN;
D O I
10.1002/pssc.200983522
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We demonstrate the growth of crack-free blue and green-emitting LED structures grown on 2-inch and 6-inch Si(111) substrates by metalorganic vapour phase epitaxy (MOVPE), using AlN nucleation layers and AlGaN buffer layers for stress management. LED device performance and its dependence on threading dislocation (TD) density and emission wavelength were studied. Despite the inherently low light extraction efficiency, an output power of 1.2 mW at 50 mA was measured from a 500 mu m square planar device, emitting at 455 nm. The light output decreases dramatically as the emission wavelength increases from 455 nm to 510 nm. For LED devices emitting at similar wavelength, the light output was more than doubled when the TD density was reduced from 5x10(9) cm(-2) to 2x10(9) cm(-2). Our results clearly show that high TD density is detrimental to the overall light output, highlighting the need for further TD reduction for structures grown on Si. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页数:3
相关论文
共 50 条
  • [31] Defect structure in selectively grown GaN films with low threading dislocation density
    Sakai, A
    Sunakawa, H
    Usui, A
    APPLIED PHYSICS LETTERS, 1997, 71 (16) : 2259 - 2261
  • [32] Low threading dislocation density in GaN films grown on patterned sapphire substrates
    Liang Meng
    Wang Guohong
    Li Hongjian
    Li Zhicong
    Yao Ran
    Wang Bing
    Li Panpan
    Li Jing
    Yi Xiaoyan
    Wang Junxi
    Li Jinmin
    JOURNAL OF SEMICONDUCTORS, 2012, 33 (11)
  • [33] Low threading dislocation density in GaN films grown on patterned sapphire substrates
    梁萌
    王国宏
    李鸿渐
    李志聪
    姚然
    王兵
    李盼盼
    李璟
    伊晓燕
    王军喜
    李晋闽
    Journal of Semiconductors, 2012, 33 (11) : 24 - 27
  • [34] Influence of miscut angle of Si(111) substrates on the performance of InGaN LEDs
    Wang, Li
    Cui, Zhi-Yong
    Huang, Fu-Sheng
    Wu, Qin
    Liu, Wen
    Wang, Xiao-Lan
    Mao, Qing-Hua
    Zhang, Jian-Li
    Jiang, Feng-Yi
    APPLIED PHYSICS EXPRESS, 2014, 7 (01)
  • [35] Reducing the dependence of threading dislocation density on doping for GaAsP/GaP on Si
    Hool, Ryan D.
    Li, Brian D.
    Sun, Yukun
    Dhingra, Pankul
    Tham, Rachel W.
    Fan, Shizhao
    Lee, Minjoo Larry
    2021 IEEE 48TH PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2021, : 666 - 668
  • [36] Current density dependence of transition energy in blue InGaN/GaN MQW LEDs
    Zhang, F.
    Ikeda, M.
    Zhou, K.
    Liu, Z. S.
    Liu, J. P.
    Zhang, S. M.
    Yang, H.
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 13 NO 5-6, 2016, 13 (5-6): : 256 - 261
  • [37] Threading dislocation propagation in AlGaN/GaN based HEMT structures grown on Si (111) by plasma assisted molecular beam epitaxy
    Manuel, Jose M.
    Morales, Francisco M.
    Garcia, Rafael
    Aidam, Rolf
    Kirste, Lutz
    Ambacher, Oliver
    JOURNAL OF CRYSTAL GROWTH, 2012, 357 : 35 - 41
  • [38] Threading dislocation reduction in three-dimensionally grown GaN islands on Si (111) substrate with AlN/AlGaN buffer layers
    Chang, Shane
    Wei, Lin Lung
    Luong, Tien Tung
    Chang, Ching
    Chang, Li
    JOURNAL OF APPLIED PHYSICS, 2017, 122 (10)
  • [39] Correlation between threading dislocation density and the refractive index of AlN grown by molecular-beam epitaxy on Si(111)
    Natali, F
    Semond, F
    Massies, J
    Byrne, D
    Laügt, S
    Tottereau, O
    Vennéguès, P
    Dogheche, E
    Dumont, E
    APPLIED PHYSICS LETTERS, 2003, 82 (09) : 1386 - 1388
  • [40] Orders of magnitude reduction in dislocation density in GaN grown on Si (111) by nano lateral epitaxial overgrowth
    Zang, K. Y.
    Chua, S. J.
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 6, 2008, 5 (06): : 1585 - 1588