Nanoscale lateral field-emission triode operating at atmospheric pressure

被引:3
|
作者
Pescini, L
Tilke, A
Blick, RH
Lorenz, H
Kotthaus, JP
Eberhardt, W
Kern, D
机构
[1] Univ Munich, Ctr NanoSci, D-80539 Munich, Germany
[2] Univ Munich, Sekt Phys, D-80539 Munich, Germany
[3] Univ Tubingen, Inst Angew Phys, D-72076 Tubingen, Germany
关键词
D O I
10.1002/1521-4095(200112)13:23<1780::AID-ADMA1780>3.3.CO;2-5
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A nano-triode fabricated out of doped silicon-on-insulator material is demonstrated. Low turn-on voltages and the possibility of direct integration into existing silicon technology are but two of the advantages of these new devices. It is also possible to tune the current collected at the drain electrode by biasing the gate electrodes. The Figure depicts a scanning electron micrograph of the free-standing silicon nanostructure.
引用
收藏
页码:1780 / 1783
页数:4
相关论文
共 50 条
  • [31] Coplanar nanoscale vacuum electron field emission triode with controllable gate distance
    Fang, Chunpei
    Liu, Xin
    He, Lai
    Ma, Shuochen
    Wang, Jinpeng
    Hou, Xun
    Zhang, Jingwen
    JOURNAL OF APPLIED PHYSICS, 2025, 137 (02)
  • [32] Nanoscale field emission structures for ultra-low voltage operation at atmospheric pressure
    DriskillSmith, AAG
    Hasko, DG
    Ahmed, H
    APPLIED PHYSICS LETTERS, 1997, 71 (21) : 3159 - 3161
  • [33] Lateral MEMS-type field-emission electron source
    Grzebyk, Tomasz
    Szyszka, Piotr
    Gorecka-Drzazga, Anna
    Dziuban, Jan A.
    2015 28TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC), 2015, : 198 - 199
  • [34] rf microelectromechanical system device with a lateral field-emission detector
    Yamashita, K
    Sun, W
    Kakushima, K
    Fujita, H
    Toshiyoshi, H
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (02): : 927 - 931
  • [35] Nanoscale Manipulation for The Fabrication of Field-emission Air-channel Transistors
    Liu, Meng
    Lei, Yu
    Li, Tie
    Wang, Yuelin
    2019 IEEE 19TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO 2019), 2019, : 459 - 462
  • [36] CNT lateral field-emission electron source for an orbitron micropump
    Grzebyk, Tomasz
    Gorecka-Drzazga, Anna
    Dziuban, Jan A.
    2011 24TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC), 2011, : 189 - 190
  • [37] Modeling of emitted current distribution and electron trajectories in the thin-film field-emission triode
    Garner, DM
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (03): : 1250 - 1257
  • [38] Field-emission diode and triode structures using self-assembled silicon nanostructure cathodes
    Lansley, S. P.
    Wu, B.
    Thongpang, S.
    Blaikie, R. J.
    Johnson, S.
    Markwitz, A.
    2006 INTERNATIONAL CONFERENCE ON NANOSCIENCE AND NANOTECHNOLOGY, VOLS 1 AND 2, 2006, : 292 - +
  • [39] Modelling of emitted current distribution and electron trajectories in the thin-film field-emission triode
    Garner, DM
    French, PJ
    TECHNICAL DIGEST OF THE 16TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, 2003, : 135 - 136
  • [40] Development of a Technology for the Creating of Diode and Triode Field-Emission Nanostructures for Signal Generating in the GHz Range
    Evsikov, I. D.
    Gryazneva, T. A.
    Filippov, N. A.
    Demin, G. D.
    Djuzhev, N. A.
    2020 7TH ALL-RUSSIAN MICROWAVE CONFERENCE (RMC), 2020, : 101 - 104