[1] Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[3] Zhejiang Lab, Hangzhou 311121, Peoples R China
[4] Univ Sci & Technol China, Sch Microelect, Hefei 230000, Peoples R China