Analysis and measurement of high frequency piezoelectric ring resonator

被引：1
|
作者：
Yang, Tingting [1 ]
Cai, Yao [1 ,2 ,3 ]
Gao, Chao [1 ]
Xu, Qinwen [1 ]
Zou, Yang [1 ]
Liu, Yan [1 ,2 ,3 ]
Liu, Wenjuan [1 ,2 ,3 ]
Lei, Cheng [1 ]
Sun, Chengliang [1 ,2 ,3 ]
机构：
[1] Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China
[2] Hubei Yangtze Memory Labs, Wuhan 430205, Peoples R China
[3] Wuhan Univ, Sch Microelect, Wuhan 430072, Peoples R China
来源：
APPLIED PHYSICS EXPRESS | 2024年 / 17卷 / 01期
基金：
中国国家自然科学基金;
关键词：
MEMS; resonators; piezoelectric; radio frequency (RF); ring resonator; DESIGN; FBAR; VIBRATIONS;
D O I：
10.35848/1882-0786/ad1003
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
This paper introduces a piezoelectric ring resonator, comprising a Mo-ScAlN-Mo sandwich structure and shaped into a ring with a hollow center. The vibrational modes of the resonator are elucidated through simulation and theoretical analysis, and the impact of diverse geometric parameters on the resonant frequency is explored. A HF resonator with a resonance frequency of 4.168 GHz has been fabricated. The electrical parameters of this resonator are extracted by fitting the Modified Butterworth-Van Dyke equivalent circuit model and the measured results. This work establishes a theoretical foundation for designing resonators with adjustable frequencies on a single wafer.
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页数：6
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