Formation of misoriented blocks during single-crystal CVD diamond growth

被引:0
|
作者
Klepikov, I. V. [1 ,2 ,3 ,10 ]
Koliadina, A. V. [1 ]
Vasilev, E. A. [4 ]
Isakove, R. V. [5 ]
Belashov, I. V. [6 ]
Alimov, P. N. [6 ]
Kudryavtsev, A. A. [7 ]
Antonov, A. V. [8 ]
Aneli, I. D. [1 ]
Liashcev, A. V. [9 ]
机构
[1] OOO NPK Almaz, 2 Voskova St,Sestroretsk, St Petersburg 197706, Russia
[2] St Petersburg State Univ, 7-9 Univ Skaya Embankment, St Petersburg 199034, Russia
[3] Russian Technol Univ MIREA, 78 Vernadsky Ave, Moscow 119454, Russia
[4] St Petersburg Min Univ, 2 21st Line, St Petersburg 199106, Russia
[5] New Diamond Technol LLC, 2 Voskova St, St Petersburg 197706, Russia
[6] OOO Almaznye Tekhnol, Petrozavodskaya St,9,Khovrino, Moscow, Russia
[7] OOO Tescan, Grazhdansky Prospekt 11, St Petersburg 195220, Russia
[8] AP Karpinsky Russian Geol Res Inst, 74 Sredniy Prospect, St Petersburg 199106, Russia
[9] AO Tethys Pro, POB 73, Moscow 117042, Russia
[10] OOO NPK Almaz, St Petersburg, Russia
基金
俄罗斯科学基金会;
关键词
CVD diamond; Internal structure; EBSD; Cathodoluminescence; Single crystal; Polycrystal; Epitaxy; Misorientation; RATE HOMOEPITAXIAL GROWTH; NITROGEN ADDITION; QUALITY; DEPOSITION; MORPHOLOGY; PHOSPHORESCENCE; TEMPERATURE;
D O I
10.1016/j.ijrmhm.2024.106571
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper presents the results of a CVD diamond crystal growth experiment on an HPHT type IIa substrate (9 x 9 mm). Data acquired through cathodoluminescence and EBSD methods shed light on the aspects of the formation of a polycrystalline shell around a single crystal of CVD diamond. CVD diamond exhibits orientation features of the polycrystalline shell, microblocks, low-angle boundaries, and linear hexagonal macrostructures of dislocation origin. Crystal splitting occurs when the dislocation density increases from the geometric center to the periphery. Such CVD diamonds exhibit a continuous transition from single crystal to polycrystal through a block-type crystal.
引用
收藏
页数:8
相关论文
共 50 条
  • [41] Beryllium-doped single-crystal diamond grown by microwave plasma CVD
    Ueda, K.
    Kasu, M.
    DIAMOND AND RELATED MATERIALS, 2009, 18 (2-3) : 121 - 123
  • [42] A CMS Luminosity Monitor Using Single-Crystal CVD Diamond Pixel Detectors
    Bartz, E.
    Doroshenko, J.
    Halyo, V.
    Harrop, B.
    Hits, D. A.
    Macpherson, A.
    Marlow, D.
    Perera, L.
    Schnetzer, S.
    Stone, R.
    JOURNAL OF INSTRUMENTATION, 2009, 4
  • [43] The large-sized diamond single-crystal synthesis by hot filament CVD
    Yamazaki, Ko
    Furuichi, Kazuyuki
    Tsumura, Iori
    Takagi, Yoshiki
    JOURNAL OF CRYSTAL GROWTH, 2008, 310 (05) : 1019 - 1022
  • [44] Fission reactor flux monitors based on single-crystal CVD diamond films
    Almaviva, S.
    Marinelli, M.
    Milani, E.
    Prestopino, G.
    Tucciarone, A.
    Verona, C.
    Verona-Rinati, G.
    Angelone, M.
    Lattanzi, D.
    Pillon, M.
    Rosa, R.
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2007, 204 (09): : 2991 - 2996
  • [45] SNOM investigation of surface morphology changes during Cr/Au contact fabrication on single-crystal CVD diamond
    Doneddu, D.
    Guy, O. J.
    Baylis, R. M.
    Chen, L.
    Dunstan, P. R.
    Mawby, P. A.
    Pirri, C. F.
    Ferrero, S.
    Twitchen, D.
    Tajani, A.
    Schwitters, M.
    SILICON CARBIDE AND RELATED MATERIALS 2005, PTS 1 AND 2, 2006, 527-529 : 1587 - 1590
  • [46] MICRODEFECT FORMATION AT SILICON SINGLE-CRYSTAL GROWTH
    SHEIKHET, EG
    FALKEVICH, ES
    NEIMARK, KN
    CHERVONYI, IF
    SHERSHEL, VA
    FIZIKA TVERDOGO TELA, 1984, 26 (01): : 207 - 213
  • [47] Porous single-crystal diamond
    Wang, Junpu
    Su, Yuzhu
    Tian, Yi
    Xiang, Xiaojun
    Zhang, Jiawei
    Li, Shuaiqi
    He, Duanwei
    CARBON, 2021, 183 : 259 - 266
  • [48] THE VAPOR EPITAXIAL-GROWTH OF SINGLE-CRYSTAL DIAMOND FILM
    ZHANG, Z
    LI, J
    SUN, ZW
    MA, LY
    FANG, LL
    SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY, 1992, 35 (11): : 1402 - 1408
  • [49] Regulating Radicals Distribution for Lateral Growth of Single-Crystal Diamond
    Cao Wei
    Gao Deng
    Fu Qiuming
    Zhao Hongyang
    Ma Zhibin
    ACTA OPTICA SINICA, 2021, 41 (20)
  • [50] Simulated growth process of single-crystal diamond at high pressure
    Wakatsuki, M
    Li, W
    Gohda, Y
    Ding, LY
    DIAMOND AND RELATED MATERIALS, 1996, 5 (01) : 56 - 64