Formation of misoriented blocks during single-crystal CVD diamond growth

被引:0
|
作者
Klepikov, I. V. [1 ,2 ,3 ,10 ]
Koliadina, A. V. [1 ]
Vasilev, E. A. [4 ]
Isakove, R. V. [5 ]
Belashov, I. V. [6 ]
Alimov, P. N. [6 ]
Kudryavtsev, A. A. [7 ]
Antonov, A. V. [8 ]
Aneli, I. D. [1 ]
Liashcev, A. V. [9 ]
机构
[1] OOO NPK Almaz, 2 Voskova St,Sestroretsk, St Petersburg 197706, Russia
[2] St Petersburg State Univ, 7-9 Univ Skaya Embankment, St Petersburg 199034, Russia
[3] Russian Technol Univ MIREA, 78 Vernadsky Ave, Moscow 119454, Russia
[4] St Petersburg Min Univ, 2 21st Line, St Petersburg 199106, Russia
[5] New Diamond Technol LLC, 2 Voskova St, St Petersburg 197706, Russia
[6] OOO Almaznye Tekhnol, Petrozavodskaya St,9,Khovrino, Moscow, Russia
[7] OOO Tescan, Grazhdansky Prospekt 11, St Petersburg 195220, Russia
[8] AP Karpinsky Russian Geol Res Inst, 74 Sredniy Prospect, St Petersburg 199106, Russia
[9] AO Tethys Pro, POB 73, Moscow 117042, Russia
[10] OOO NPK Almaz, St Petersburg, Russia
基金
俄罗斯科学基金会;
关键词
CVD diamond; Internal structure; EBSD; Cathodoluminescence; Single crystal; Polycrystal; Epitaxy; Misorientation; RATE HOMOEPITAXIAL GROWTH; NITROGEN ADDITION; QUALITY; DEPOSITION; MORPHOLOGY; PHOSPHORESCENCE; TEMPERATURE;
D O I
10.1016/j.ijrmhm.2024.106571
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper presents the results of a CVD diamond crystal growth experiment on an HPHT type IIa substrate (9 x 9 mm). Data acquired through cathodoluminescence and EBSD methods shed light on the aspects of the formation of a polycrystalline shell around a single crystal of CVD diamond. CVD diamond exhibits orientation features of the polycrystalline shell, microblocks, low-angle boundaries, and linear hexagonal macrostructures of dislocation origin. Crystal splitting occurs when the dislocation density increases from the geometric center to the periphery. Such CVD diamonds exhibit a continuous transition from single crystal to polycrystal through a block-type crystal.
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页数:8
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